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Proceedings Paper

Evaluation of the optical performance of a novel high-speed focal-distance-modulated fibre-coupled confocal sensor
Author(s): Andreas C. Gröschl; Janik Schaude; Tino Hausotte
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Paper Abstract

This article presents the evaluation of the optical performance of a new high-frequency focal-distance-modulated confocal point sensor. While maintaining the known advantages of the confocal measurement principle, the sen- sor represents an innovative combination of a fibre-coupled confocal illumination and detection with a tuneable, acoustically driven gradient-index fluid lens (TAG lens) for the modulation of the focus distance and a novel signal processing utilizing a lock-in amplifier. The new arrangement is able to achieve an approximately linear characteristic curve for the optimised feedback control of nano coordinate measuring systems (CMS) in scanning sample mode. This article emphasises the implementation and use of the sensor in nano CMS (NMM-1) and the advantages of the new signal processing. Measurements on different resolution standards are conducted and compared with the focal-distance-modulated sensor and without focus-distance-modulation as conventional confocal microscope (CCM).

Paper Details

Date Published: 21 June 2019
PDF: 8 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560N (21 June 2019);
Show Author Affiliations
Andreas C. Gröschl, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Janik Schaude, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Tino Hausotte, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)


Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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