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Proceedings Paper

Optical performances of new materials in the EUV spectral range: metrology, methods and results
Author(s): Paola Zuppella; Ahmed E. H. Gaballah; Nadeem Ahmed; Kety Jimenez; Piergiorgio Nicolosi
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Paper Abstract

The setting up of experimental techniques, the synergic use of ellipsometry systems and synchrotron light sources are pivotal in the characterization and optimization of thin films devoted to EUV–VUV applications. The present manuscript will go through the research methods and the results obtained at CNR–IFN laboratories, by explaining the approaches adopted on the study of novel materials for the development of high throughputs EUV–VUV transmission filters, reflective coatings and phase retarders.

Paper Details

Date Published: 26 April 2019
PDF: 6 pages
Proc. SPIE 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI, 110320B (26 April 2019); doi: 10.1117/12.2525893
Show Author Affiliations
Paola Zuppella, National Research Council (CNR), Institute for Photonics and Nanotechnologies (IFN) (Italy)
Ahmed E. H. Gaballah, Univ. degli Studi di Padova (Italy)
Nadeem Ahmed, Univ. degli Studi di Padova (Italy)
Kety Jimenez, Univ. degli Studi di Padova (Italy)
Piergiorgio Nicolosi, Univ. degli Studi di Padova (Italy)

Published in SPIE Proceedings Vol. 11032:
EUV and X-ray Optics: Synergy between Laboratory and Space VI
René Hudec; Ladislav Pina, Editor(s)

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