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Proceedings Paper

Modelling of direct laser writing in multilayer absorbing medium
Author(s): Anton Saetchnikov; Elina Tcherniavskaia; Vladimir Saetchnikov; Andreas Ostendorf
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Paper Abstract

A model that describes polymerization unit formation in multilayer absorbing medium for direct laser writing has been proposed. Properties of separate layers including surface roughness, illumination geometry, pulsed laser source and photosensitive material are parameters of the discussed model. A set of simulations has been carried out where the influence of the refractive indexes relation, layer thickness, roughness of the particular layers with respect to the structuring depth on the structure-model match and reproducibility has been analysed and discussed.

Paper Details

Date Published: 21 June 2019
PDF: 7 pages
Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 110571B (21 June 2019); doi: 10.1117/12.2525730
Show Author Affiliations
Anton Saetchnikov, Ruhr-Univ. Bochum (Germany)
Belarusian State Univ. (Belarus)
Elina Tcherniavskaia, Belarusian State Univ. (Belarus)
Vladimir Saetchnikov, Belarusian State Univ. (Belarus)
Andreas Ostendorf, Ruhr-Univ. Bochum (Germany)

Published in SPIE Proceedings Vol. 11057:
Modeling Aspects in Optical Metrology VII
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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