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Proceedings Paper

Correction of surface error occurring in microlenses characterization performed by optical profilers
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Paper Abstract

Characterizing the surface of microlenses by optical profilers has the important advantages of measurement speed, flexibility and automation. Nevertheless, the accuracy of such characterization is limited by error occurring in non-flat measurements. Here, we propose a method that uses multiple measurements of a single reference ball combined with a machine learning algorithm that fits the experimental data to correct the measurements. The success of the method is demonstrated by showing that the residual error after correction reaches 20 nm RMS. Such results extend greatly the quality of microlens characterization by optical profilers.

Paper Details

Date Published: 21 June 2019
PDF: 5 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560Z (21 June 2019); doi: 10.1117/12.2525693
Show Author Affiliations
Jeremy Béguelin, SUSS MicroOptics SA (Switzerland)
Torald Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Wilfried Noell, SUSS MicroOptics SA (Switzerland)
Reinhard Voelkel, SUSS MicroOptics SA (Switzerland)

Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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