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Proceedings Paper

Polarization metrology for high numerical aperture DUV objectives
Author(s): Robert D. Grejda; Paul F. Michaloski; Duncan C. Spaulding; Stephen K. Mack; Robert L. Michaels; Paul G. Dewa; David L. Aronstein
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Paper Abstract

This paper describes an instrument and method for high-resolution characterization of lens components and assemblies for DUV retardance performance at various stages of manufacture. The instrument is a bespoke rotating analyzer Stokes polarimeter designed for DUV wavelengths (e.g. 193 nm, 213 nm, 266 nm, etc.). Using a laser source, the polarimeter delivers a small diameter beam with a characterized polarization state to the optical lens element or objective assembly at the “as-used” design angles of incidence (AOI) to characterize the retardance through the lens or objective at an arbitrary location. The polarization characteristics are usually described by the retardance at specific locations on a component or sub-assembly that can be used to characterize components during development and manufacturing or optimize performance of an assembly.

Paper Details

Date Published: 21 June 2019
PDF: 11 pages
Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 110570P (21 June 2019); doi: 10.1117/12.2525606
Show Author Affiliations
Robert D. Grejda, Corning Tropel Corp. (United States)
Paul F. Michaloski, Corning Tropel Corp. (United States)
Duncan C. Spaulding, Corning Tropel Corp. (United States)
Stephen K. Mack, Corning Tropel Corp. (United States)
Robert L. Michaels, Corning Tropel Corp. (United States)
Paul G. Dewa, Corning Tropel Corp. (United States)
David L. Aronstein, Corning Tropel Corp. (United States)

Published in SPIE Proceedings Vol. 11057:
Modeling Aspects in Optical Metrology VII
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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