Increasing miniaturization requires improved and highly miniaturized optical 3D metrology systems. In this paper a basic measurement principle and a proposed optical design of a highly miniaturized endoscopic spatial confocal point distance sensor are presented. The sensor uses a, to our knowledge new technique called spatial confocal point distance measurement. A special feature of the proposed sensor design is the high degree of miniaturization, through femtosecond direct laser writing and the use of optical fiber bundles, which enable an endoscopic application.

Date Published: 21 June 2019
PDF: 7 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560M (21 June 2019); doi: 10.1117/12.2525573

Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)