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Proceedings Paper

Forming an ultrathin and lightweight x-ray micropore optics into a single substrate
Author(s): K. Nomoto; K. Doi; Y. Nawaki; K. Uetsuki; R. Hata; K. Tsuruoka; H. Kodaka; H. Itoh; Y. Harada; Y. Asakawa
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Paper Abstract

Compact and lightweight X-ray micropore optics with high quality stability have been developed utilizing our microfabrication technology. We have fabricated Schmidt type Lobster Eye Optics named Pre Bread Board Model (PreBBM). This optics has a plurality of oblique grooves having a width of 10 um formed by laser modification and wet etching in flat glass substrate. Both smoothing by annealing and Pt coating were applied on the groove surface to complete Pre-BBM. And we conducted the first X-ray irradiation test. In order to obtain high X-ray reflectivity, next challenge is to reduce surface roughness of the micropore side wall to nanometers or less. We adopted magnetic fluid polishing and glass annealing technology as a method to reduce surface roughness of the glass. We are trying to optimize the condition to achieve side wall surface roughness of 1 nm.

Paper Details

Date Published: 9 September 2019
PDF: 11 pages
Proc. SPIE 11108, Advances in X-Ray/EUV Optics and Components XIV, 111080P (9 September 2019); doi: 10.1117/12.2525562
Show Author Affiliations
K. Nomoto, Ushio Inc. (Japan)
K. Doi, Ushio Inc. (Japan)
Y. Nawaki, Ushio Inc. (Japan)
K. Uetsuki, Ushio Inc. (Japan)
R. Hata, Ushio Inc. (Japan)
K. Tsuruoka, Ushio Inc. (Japan)
H. Kodaka, Ushio Inc. (Japan)
H. Itoh, Laser Systems Inc. (Japan)
Y. Harada, Laser Systems Inc. (Japan)
Y. Asakawa, Laser Systems Inc. (Japan)


Published in SPIE Proceedings Vol. 11108:
Advances in X-Ray/EUV Optics and Components XIV
Ali M. Khounsary; Shunji Goto; Christian Morawe, Editor(s)

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