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Proceedings Paper

Reliability results of a fully automated robust x-y stage measurement unit for precise light distribution measurement
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Paper Abstract

The presented x-y stage measurement unit uses 2 linear cross mounted stages, where the stages are mounted on a heavy aluminum holder to ensure low vibrations and precise repeatable positions. The travel range in x and y direction is 52 mm resulting in a 52 mm x 52 mm scan area. The lowest step size in x and y direction is ▵x = ▵y = 0.2 μm. The software LabView controls with a computer the 2 stages and as well as the detector to ensure a fully automated set-up. After implementing, mounting and testing all components of this measurement unit repeatability tests were performed with a red LED array as source. 40 different measurements (step size ▵x = ▵y = 1.0 mm over full 52 mm x 52 mm) were taken under same conditions. A statistical analysis, results in a low uncertainty of < 0.06 % (1 standard deviation) as maximum deviation. This shows the high precision reached with this developed fully automated measurement unit..

Paper Details

Date Published: 21 June 2019
PDF: 7 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110563F (21 June 2019); doi: 10.1117/12.2525427
Show Author Affiliations
S. Reichel, Pforzheim Univ. (Germany)
D. Aichert, Pforzheim Univ. (Germany)
T. Schäufele, Pforzheim Univ. (Germany)
B. Özdemir, Pforzheim Univ. (Germany)
H. Söylemez, Pforzheim Univ. (Germany)
D. Stankic, Pforzheim Univ. (Germany)


Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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