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Proceedings Paper

Determination of alternative monitoring wavelength to increase the accuracy of measuring the layers thickness during the thin films manufacture
Author(s): Thai Phi Ngo; L. A. Gubanova; Van Hoa Pham
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Paper Abstract

Currently, there are various methods to control the layers thicknesses during their manufacture and optical monitoring method is the basically used most often today. In this paper, we consider a method for determining the monitoring wavelength to control the optical thickness of each layer during its fabrication. By applying the method, it is possible to reduce errors in layer thicknesses and to obtain the spectral characteristic of the transmittance (or reflection) of the experimental coating that is maximally close to the theoretical spectra. The experimental results of thin films with high spectral performance showed that the method can effectively reduce the errors in layers thickness.

Paper Details

Date Published: 21 June 2019
PDF: 6 pages
Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 1105719 (21 June 2019); doi: 10.1117/12.2525356
Show Author Affiliations
Thai Phi Ngo, ITMO Univ. (Russian Federation)
L. A. Gubanova, ITMO Univ. (Russian Federation)
Van Hoa Pham, ITMO Univ. (Russian Federation)


Published in SPIE Proceedings Vol. 11057:
Modeling Aspects in Optical Metrology VII
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

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