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Proceedings Paper

Three-dimensional shape measurement of fine structure by detecting phase distribution of only zeroth order diffraction beam based on speckle interferometry
Author(s): Y. Arai
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Paper Abstract

In the measurement of three-dimensional structure beyond the diffraction limit of the objective lens of the optical system using the speckle interferometry, it was reported that the shape of a measured object can be measured by detecting the change of phase distribution generated by a lateral shift instead of analyzing the focal image of the measured object. In this paper, it is investigated that the three-dimensional shape measurement can be realized by detecting the phase change of only the zeroth-order diffraction light by the lateral shift of the object using experimental results. As a result, it is confirmed that the shape information of the object is included in the zeroth-order diffraction light and that the three-dimensional shape can be measured by using only zeroth-order light without any higher order diffraction lights.

Paper Details

Date Published: 21 June 2019
PDF: 8 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560B (21 June 2019); doi: 10.1117/12.2525260
Show Author Affiliations
Y. Arai, Kansai Univ. (Japan)


Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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