Share Email Print

Proceedings Paper

A method for improving the accuracy of an extinction coefficient measurement of weakly absorbing interference layers
Author(s): Van Ba Nguyen; Ludmila Aleksandrovna Gubanova; Dinh Bao D. B. Bui
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A method of measuring the dimensionless extinction coefficient for optical thin-film layers of weakly absorbing filmforming materials using a parallelepiped form attachment is presented. The attachment uses frustrated total internal reflection to multiply radiation losses in tested thin film layers. Influences of some main factors on accuracy of the method have been studied and the results show that those influences can be compensated and as the result of it the measurement error can be reduced to 1%.

Paper Details

Date Published: 21 June 2019
PDF: 7 pages
Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 110571M (21 June 2019); doi: 10.1117/12.2525068
Show Author Affiliations
Van Ba Nguyen, ITMO Univ. (Russian Federation)
Ludmila Aleksandrovna Gubanova, ITMO Univ. (Russian Federation)
Dinh Bao D. B. Bui, Le Quy Don Technical Univ. (Viet Nam)

Published in SPIE Proceedings Vol. 11057:
Modeling Aspects in Optical Metrology VII
Bernd Bodermann; Karsten Frenner; Richard M. Silver, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?