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Proceedings Paper

Comparison of interferometer and d’nanoimager for profiling large objects (Conference Presentation)

Paper Abstract

Recovering the phase of radiation is of general interest in material and biomedical science, and in nanotechnology. Commercial interferometers have been widely used in a variety of applications, if equipped with a spatial light modulator or a computer generate hologram, theoretically the interferometer can measure a variety of surface objects. At present, the new non-interferometric quantitative phase recovery method based on Transport of Intensity Equations (TIE) is widely used in the field of microstructure measurement and bioimaging. Compared with interferometric measurement, the Transport of Intensity Equations does not need additional reference light, and has good ability of anti-vibration. In this paper, the ubiquitous interferometer and the new d’Nanoimager based on the Transport of Intensity Equations (TIE) are compared with respect to measuring larger objects of different profiles. These two methods are compared with respect of their accuracy and resolution of measurement and speed of acquiring data and other experimental consideration. In addition, a large number of subjects are selected for specific applications include flat surface such as the display screen of smartphones, to lens testing both spherical and cylindrical lenses and specific application such as corrosion pitting of aluminum disks. The comparative advantages and dis-advantages of the two methods are explored, as well as their application.

Paper Details

Date Published: 10 September 2019
Proc. SPIE 11102, Applied Optical Metrology III, 111020J (10 September 2019); doi: 10.1117/12.2524704
Show Author Affiliations
Dingfu Chen, Shanghai Univ. (China)
Yingjie Yu, Shanghai Univ. (China)
Jianfei Sun, Nanyang Technological Univ. (Singapore)
Prathan Buranasiri, King Mongkut's Institute of Technology Ladkrabang (Thailand)
Sutha Sutthiruangwong, King Mongkut's Institute of Technology Ladkrabang (Thailand)
Thanthanat Srisuwan, King Mongkut's Institute of Technology Ladkrabang (Thailand)
Anand Asundi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 11102:
Applied Optical Metrology III
Erik Novak; James D. Trolinger, Editor(s)

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