Share Email Print
cover

Proceedings Paper

Technical research on fabricating steep off-axis aspherical mirror based on infrared interferometric testing
Author(s): Heng Zhu; Zhenjun Bao; Jie Liu; Zhigang Li; Dingyao Yan; Ping Ma
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

This article mainly take the research on the technique of fabricating a steep off-axis aspherical mirror based on infrared interferometric testing. In the stage of asphercal shape grinding ,we take use of an infrared interferometer to test the aspherical surface error rapidly, along with the arm-swinging polishing method and choose the appropriate processing parameters according to the testing results. After more than twenty times polishing and testing circles ,the off-axis mirror’s wavefront error converge to PV≤5 λ,RMS≤1 λ(λ=632.8nm),this surface map is suitable for the final sub-surface polishing. Through these research and experiments, we have verified the applied advantage of infrared interferometric technique in fabricating steep off-axis aspherical mirror. This technology is also very useful in the processing other types of large-scale aspherical mirrors.

Paper Details

Date Published: 10 May 2019
PDF: 4 pages
Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 1106825 (10 May 2019); doi: 10.1117/12.2524686
Show Author Affiliations
Heng Zhu, Chengdu Fine Optical Engineering Research Ctr. (China)
Zhenjun Bao, Chengdu Fine Optical Engineering Research Ctr. (China)
Jie Liu, Chengdu Fine Optical Engineering Research Ctr. (China)
Zhigang Li, Chengdu Fine Optical Engineering Research Ctr. (China)
Dingyao Yan, Chengdu Fine Optical Engineering Research Ctr. (China)
Ping Ma, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 11068:
Second Symposium on Novel Technology of X-Ray Imaging
Yangchao Tian; Tiqiao Xiao; Peng Liu, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray