Share Email Print
cover

Proceedings Paper

Improvements of the PLD (Pulsed Laser Deposition) method for fabricating photocathodes in ICMOS (Intensified CMOS) sensors
Author(s): Dae-Hee Lee; Youngsik Park; Bongkon Moon; Yong-Woo Kang; Won-Kee Park; Seoung-Chul Bang; Hyeunseok Choi; Sung Bok Kang; Nikolay Vedenkin; Alexander Malyshev; Yang-Sook Kim
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

We introduce new technologies improving the PLD (Pulsed Laser Deposition) method to fabricate visible (370 ~ 600 nm) and NUV (Near Ultraviolet, 185 ~ 320 nm) photocathodes for IIT (Image Intensifier Tube) sensors. The multi-purpose PLD VC (Vacuum Chamber) by utilizing optical window viewports and a couple of internal carousels can do the whole process of the laser deposition of various alkalis, including the measurement the QE (Quantum Efficiency) in-situ, for multiple photocathode targets. Then, we have integrated a Load/Degassing/Assembly (LDA) VC to the PLD VC, to prepare, load, degas, and assemble the alkali targets and the photocathode substrates. With these facilities, we have manufactured high QE photocathodes free from oxidation and water vapor contamination during the process. In this paper, we describe detail procedures of our new technologies to make S20 and CsTe photocathodes for visual and NUV wavelengths respectively, and discuss about the test results of the IIT products.

Paper Details

Date Published: 11 April 2019
PDF: 9 pages
Proc. SPIE 11028, Optical Sensors 2019, 110282Y (11 April 2019); doi: 10.1117/12.2524640
Show Author Affiliations
Dae-Hee Lee, Korea Astronomy and Space Science Institute (Korea, Republic of)
Univ. of Science and Technology (Korea, Republic of)
Youngsik Park, Korea Astronomy and Space Science Institute (Korea, Republic of)
Bongkon Moon, Korea Astronomy and Space Science Institute (Korea, Republic of)
Yong-Woo Kang, Korea Astronomy and Space Science Institute (Korea, Republic of)
Won-Kee Park, Korea Astronomy and Space Science Institute (Korea, Republic of)
Seoung-Chul Bang, Korea Astronomy and Space Science Institute (Korea, Republic of)
Hyeunseok Choi, Korea Institute of Industrial Technology (Korea, Republic of)
Sung Bok Kang, Korea Institute of Industrial Technology (Korea, Republic of)
Nikolay Vedenkin, Satbyul Corporation, Ltd. (Korea, Republic of)
Alexander Malyshev, Satbyul Corp., Ltd. (Korea, Republic of)
Yang-Sook Kim, Satbyul Corp., Ltd. (Korea, Republic of)


Published in SPIE Proceedings Vol. 11028:
Optical Sensors 2019
Francesco Baldini; Jiri Homola; Robert A. Lieberman, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray