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Proceedings Paper

Motionless and fast measurement technique for obtaining the spectral diffraction efficiencies of a grating
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Paper Abstract

The measurement of the spectral diffraction efficiencies of a diffraction grating is essential for improving the manufacturing technique and for assessing the grating’s function in practical applications. The drawback of the currently popular measurement technique is its slow speed due to the hundreds of repetitions of two kinds of time-consuming mechanical movements during the measuring process. This limitation greatly restricts the usage of this technique in dynamic measurement. We present here a motionless and fast measurement technique for obtaining the spectral diffraction efficiencies of a plane grating, effectively eliminating the aforementioned two kinds of mechanical movement. We estimate that the spectral measurement can be achieved on a millisecond timescale. Our motionless and fast measuring technique will find broad applications in dynamic measurement environments and mass industrial testing.

Paper Details

Date Published: 21 June 2019
PDF: 7 pages
Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110562G (21 June 2019); doi: 10.1117/12.2524573
Show Author Affiliations
Shenghao Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
ZC Optoelectronic Technologies, Ltd. (China)
Anhui Province Key Lab. of Non-Destructive Evaluation (China)
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Zhouling Wu, ZC Optoelectronic Technologies, Ltd. (China)
Anhui Province Key Lab. of Non-Destructive Evaluation (China)
Jian Chen, ZC Optoelectronic Technologies, Ltd. (China)
Anhui Province Key Lab. of Non-Destructive Evaluation (China)
Ming Huang, ZC Optoelectronic Technologies, Ltd. (China)
Anhui Province Key Lab. of Non-Destructive Evaluation (China)


Published in SPIE Proceedings Vol. 11056:
Optical Measurement Systems for Industrial Inspection XI
Peter Lehmann; Wolfgang Osten; Armando Albertazzi Gonçalves Jr., Editor(s)

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