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Proceedings Paper

Processing technology of magnetorheological finishing for large-aperture optical components
Author(s): Jing Hou; Xianhua Chen; Jie Li; Bo Zhong; Wen-hui Deng; Nan Zheng
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Paper Abstract

Magnetorheological finishing (MRF) is a deterministic optical element polishing method that achieves material removal by means of the sheared and rheo-logical behavior of magnetorheological fluids. To realize high precision fabrication of large-aperture optical components, MRF technology had been explored in this paper. The main factors affecting the removal efficiency were investigated by orthogonal experiment. It indicated that the influence of the immersion depth and the thickness of ribbon on removal efficiency was more remarkable than the other parameters. The process of MRF machining component is established. Finally, the 590mm × 400mm plane optical element are manufactured using the MRF, and the result are very good.

Paper Details

Date Published: 10 May 2019
PDF: 5 pages
Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 110681I (10 May 2019); doi: 10.1117/12.2524540
Show Author Affiliations
Jing Hou, Research Ctr. of Laser Fusion (China)
Xianhua Chen, Research Ctr. of Laser Fusion (China)
Jie Li, Research Ctr. of Laser Fusion (China)
Bo Zhong, Research Ctr. of Laser Fusion (China)
Wen-hui Deng, Research Ctr. of Laser Fusion (China)
Nan Zheng, Research Ctr. of Laser Fusion (China)


Published in SPIE Proceedings Vol. 11068:
Second Symposium on Novel Technology of X-Ray Imaging
Yangchao Tian; Tiqiao Xiao; Peng Liu, Editor(s)

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