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Proceedings Paper

Generation of asymmetrical Bessel-like laser beams for glass dicing
Author(s): Juozas Dudutis; Rokas Stonys; Gediminas Račiukaitis; Paulius Gečys
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Paper Abstract

The intra-distance between laser-induced modifications is the limiting factor of glass dicing speed and efficiency. In this work, we present a novel method for the generation of directional cracks in the bulk of glass to enhance the dicing performance. The asymmetrical Bessel-like laser beams with a long non-diffractive length were formed by filtering their spectra of spatial frequencies. Experiments were carried out using the mJ-level laser source with sub-nanosecond pulse duration. The dicing process was optimised by varying processing parameters. The flexural strength of the modified material was measured using the four-point bending setup. Results showed that asymmetrical intensity distribution enables higher dicing speed, better cleavability and quality, compared to symmetrical Bessel-like laser beams.

Paper Details

Date Published: 9 September 2019
PDF: 7 pages
Proc. SPIE 11107, Laser Beam Shaping XIX, 1110709 (9 September 2019); doi: 10.1117/12.2524473
Show Author Affiliations
Juozas Dudutis, Ctr. for Physical Sciences and Technology (Lithuania)
Rokas Stonys, Ctr. for Physical Sciences and Technology (Lithuania)
Gediminas Račiukaitis, Ctr. for Physical Sciences and Technology (Lithuania)
Paulius Gečys, Ctr. for Physical Sciences and Technology (Lithuania)

Published in SPIE Proceedings Vol. 11107:
Laser Beam Shaping XIX
Angela Dudley; Alexander V. Laskin, Editor(s)

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