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Proceedings Paper

Microchannels on aluminosilicate glass fabricated by selective laser etching
Author(s): Lingfeng Jiang; Chenlin Du; Bo Li; Dezhi Liang; Ke Wang
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Paper Abstract

We demonstrate a technique called “In volume Selective Laser Etching” (ISLE) to combine femtosecond laser modification technique with chemical etching for the fabrication of microchannels in the aluminosilicate glass. The influence of laser power on the length-diameter ratio of microchannels is studied. We fabricated tapered aluminosilicate glass microchannels with diameters from 30 to 50 μm. We used the same method to modify surface of aluminosilicate glass, and obtained taper-free microgrooves with a width of 50 μm. The microgrooves had no length limitation. In industrial production, the surface roughness was also improved in this way.

Paper Details

Date Published: 29 March 2019
PDF: 6 pages
Proc. SPIE 11046, Fifth International Symposium on Laser Interaction with Matter, 110462T (29 March 2019); doi: 10.1117/12.2524418
Show Author Affiliations
Lingfeng Jiang, Shenzhen Univ. (China)
Shenzhen Technology Univ. (China)
Chenlin Du, Shenzhen Univ. (China)
Shenzhen Technology Univ. (China)
Bo Li, Shenzhen Univ. (China)
Shenzhen Technology Univ. (China)
Dezhi Liang, Shenzhen Univ. (China)
Shenzhen Technology Univ. (China)
Ke Wang, Shenzhen Univ. (China)
Shenzhen Technology Univ. (China)


Published in SPIE Proceedings Vol. 11046:
Fifth International Symposium on Laser Interaction with Matter
YiJun Zhao, Editor(s)

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