The welding of glass using ultrashort laser pulse has attracted much attention due to its potential applications in many fields such as solar cells, implanted microelectronics, OLED, MEMS, micro sensors and so on. However the optical contact which requires a distance between two glasses less than 100 nm is a very harsh requirements in practical engineering applications. A welding method of glass, which adopts bursts sequences of ultrashort laser pulses oscillated in a small region to react more glass material and release heat stress gently, is presented in this paper. In this way, a stable and mild liquid pool with more melt glass can be achieved to weld glasses with large gap. The maximum gap distance between two glasses is almost 40 μm which is an order of magnitude higher than other methods, and the joint strength of the glass weld with the natural contact gap of 10 μm is up to 64 MPa. At last, the encapsulation experiment of the welding glass with a closed area was carried out to prove that the sample can guarantee good sealing in 100 hours.

Date Published: 4 March 2019
PDF
Proc. SPIE 10906, Laser-based Micro- and Nanoprocessing XIII, 109060L (4 March 2019); doi: 10.1117/12.2522963

Published in SPIE Proceedings Vol. 10906:
Laser-based Micro- and Nanoprocessing XIII
Udo Klotzbach; Akira Watanabe; Rainer Kling, Editor(s)