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Proceedings Paper

Polydimethylsiloxane optical microring resonator by nano-imprint lithography on MgF2 substrate
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Paper Abstract

A new type of polydimethylsiloxane (PDMS) optical microring resonator on MgF2 substrate is proposed and fabricated by nano-imprint lithography. The measured quality factors of the resonators were in the order of 104 in the C band. Our work provides a new method for fabrication of on-chip whispering gallery mode resonators, which can benefit the applications in communication and sensing fields.

Paper Details

Date Published: 14 February 2019
PDF: 5 pages
Proc. SPIE 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018), 110484O (14 February 2019); doi: 10.1117/12.2522923
Show Author Affiliations
Bingjie Chen, Chongqing Univ. (China)
Ligang Huang, Chongqing Univ. (China)
Leilei Shi, Chongqing Univ. (China)
Tao Zhu, Chongqing Univ. (China)

Published in SPIE Proceedings Vol. 11048:
17th International Conference on Optical Communications and Networks (ICOCN2018)
Zhaohui Li, Editor(s)

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