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Proceedings Paper

Fabrication of multi-layer micropillars array in micro-grooving technology
Author(s): S. B. Xia; Y. B. He; S. J. Wang
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Paper Abstract

The micro-grooving technology/micro-ruling technology is a special and efficient manufacturing technology and generally used to machine the cylindrical surface and micro grooved structures array. This paper investigates the fabrication of different types of micro structures by ruling. Experiment is conducted to machine a multi-layer micropillar array with a sharp diamond cutting tool by micro-grooving. Experimental results show that micro-grooving technology is feasible for the machining of multi-layer micropillar array with submicrometer form accuracy.

Paper Details

Date Published: 6 January 2020
PDF: 6 pages
Proc. SPIE 11383, Sixth Asia Pacific Conference on Optics Manufacture, 1138303 (6 January 2020); doi: 10.1117/12.2522649
Show Author Affiliations
S. B. Xia, Guangdong Univ. of Technology (China)
Y. B. He, Guangdong Univ. of Technology (China)
S. J. Wang, Guangdong Univ. of Technology (China)

Published in SPIE Proceedings Vol. 11383:
Sixth Asia Pacific Conference on Optics Manufacture
C. F. Benny Cheung; Lai Ting Ho, Editor(s)

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