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Proceedings Paper

Improving the selectivity of carbon nanotube-based gas sensors via UV irradiation
Author(s): N. Nekrasov; I. Bobrinetskii; V. Nevolin; S. Khartov
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Paper Abstract

Carbon nanotube still holding the promising application in ultimate response sensors because of possibility of individual nanotubes operation for single molecular detection. The technology of local positioning of carbon nanotubes is well developed and integrated to conventional microelectronics processes. The problem is in relatively inert behavior of carbon atomic lattice that do not provide good charge transfer between nanotubes and small molecules decreasing the responsivity of sensors. The promising area of gas sensors for ammonia and nitrogen dioxide is covered by functionalized carbon nanotubes. Simply fabricated by chemical vapor deposition carbon nanotubes allow to functionalize them directly on substrate without working with solution. The effect of UV treatment on gas response changes for samples processed during different time and in two different atmospheres was investigated. In this report we study the process of UV functionalization of single-walled carbon nanotubes networks using Raman spectroscopy and atomic force microscopy. The dependence of carbon nanotubes sensitivity from UV processing time was evaluated.

Paper Details

Date Published: 15 March 2019
PDF: 6 pages
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220X (15 March 2019); doi: 10.1117/12.2522440
Show Author Affiliations
N. Nekrasov, National Research Univ. of Electronic Technology (Russian Federation)
I. Bobrinetskii, National Research Univ. of Electronic Technology (Russian Federation)
BioSense Institute (Serbia)
V. Nevolin, National Research Univ. of Electronic Technology (Russian Federation)
S. Khartov, Federal Research Ctr. "Crystallography and Photonics" of the RAS (Russian Federation)

Published in SPIE Proceedings Vol. 11022:
International Conference on Micro- and Nano-Electronics 2018
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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