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Proceedings Paper

Optical emission spectra of BF3/Ar-plasma: detection of the boron 563.3 nm spectral line and identification of BF band spectra
Author(s): V. Kudrya
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Paper Abstract

An analysis of the spectral line contour at 563.5 nm observed in optical emission spectra of BF3/Ar plasma has revealed an overlap of two closely spaced lines belonging to B and Ar. Identification of some electron-vibrational bands observed in the range 300-400 nm has showed that they belong to BF. The relative intensities of the bands are in good agreement with the known Franck-Condon factors for BF.

Paper Details

Date Published: 15 March 2019
PDF: 7 pages
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102227 (15 March 2019); doi: 10.1117/12.2522166
Show Author Affiliations
V. Kudrya, Institute of Physics and Technology of the RAS (Russian Federation)


Published in SPIE Proceedings Vol. 11022:
International Conference on Micro- and Nano-Electronics 2018
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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