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Proceedings Paper

3D microtransformers with air core inside fused silica
Author(s): Jinwei Duan; Qing Yang; Chao Shan; Feng Chen
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Paper Abstract

We present a fabrication method for 3D microtransformers with air core inside silica glass by means of femtosecond-laser-wet-etching (FLWE) and metal-microsolidifying, for very high frequency applications. A fabricated transformer with 24turns of primary coil and 12 turns of secondary coil,yielded an inductance of 70nH and 55nH. The maximum transformer efficiency of 62% was measured at a load of 50 Ω. Finally, the embedded 3D micro-transformer can be easily integrated with other microelectrical, mechanical and optical systems, applying in MEMS, sensors and lab-on-chips.

Paper Details

Date Published: 24 January 2019
PDF: 6 pages
Proc. SPIE 11052, Third International Conference on Photonics and Optical Engineering, 1105211 (24 January 2019); doi: 10.1117/12.2521945
Show Author Affiliations
Jinwei Duan, Xi'an Jiaotong Univ. (China)
Qing Yang, Xi'an Jiaotong Univ. (China)
Chao Shan, Xi'an Jiaotong Univ. (China)
Feng Chen, Xi'an Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 11052:
Third International Conference on Photonics and Optical Engineering
Ailing Tian, Editor(s)

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