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Proceedings Paper

Hybrid acousto-nano-biosensor
Author(s): Vladimir V. Kolesov; Vladimir V. Anisimkin; Iren E. Kuznetsova; Eugenii S. Soldatov; Sarkis A. Dagesyan; Alexander E. Melnikov; Vadim V. Kashin; Andrey V. Smirnov
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Paper Abstract

The technology realizing two multi-scale structures on piezoelectric single crystal lithium niobate plate was developed. The system of interdigital electrodes for the acoustic delay line operating at the range 2-3 MHz was produced by using photolithography. This delay line was combined with the nanotransduces having size about 60-80 nm. These transducers were produced by using negative electron-beam nanolithography.

Paper Details

Date Published: 15 March 2019
PDF: 4 pages
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220Y (15 March 2019); doi: 10.1117/12.2521796
Show Author Affiliations
Vladimir V. Kolesov, Kotelnikov Institute of Radio Engineering and Electronics of RAS (Russian Federation)
Vladimir V. Anisimkin, Kotelnikov Institute of Radio Engineering and Electronics of RAS (Russian Federation)
Iren E. Kuznetsova, Kotelnikov Institute of Radio Engineering and Electronics of RAS (Russian Federation)
Eugenii S. Soldatov, M.V. Lomonosov Moscow State Univ. (Russian Federation)
Sarkis A. Dagesyan, M.V. Lomonosov Moscow State Univ. (Russian Federation)
Alexander E. Melnikov, M.V. Lomonosov Moscow State Univ. (Russian Federation)
Vadim V. Kashin, Kotelnikov Institute of Radio Engineering and Electronics of RAS (Russian Federation)
Andrey V. Smirnov, Kotelnikov Institute of Radio Engineering and Electronics of RAS (Russian Federation)


Published in SPIE Proceedings Vol. 11022:
International Conference on Micro- and Nano-Electronics 2018
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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