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Proceedings Paper

8x8 silicon photodiode matrix module
Author(s): Dawei He; Jinggui Lu; Fuwen Zhang
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Paper Abstract

8 X 8 silicon photo diode matrix module has been successfully fabricated by hybrid integrating technique. In this paper, the principle, the design, the structure, fabrication process and its main parameters of PIN-PD matrix module which has special arrangement of electrode and structure of piling up optical-electro isolation are mainly described.

Paper Details

Date Published: 25 September 1996
PDF: 3 pages
Proc. SPIE 2894, Detectors, Focal Plane Arrays, and Applications, (25 September 1996); doi: 10.1117/12.252118
Show Author Affiliations
Dawei He, Changchun Institute of Physics (China)
Jinggui Lu, Changchun Institute of Physics (China)
Fuwen Zhang, Changchun Institute of Physics (China)

Published in SPIE Proceedings Vol. 2894:
Detectors, Focal Plane Arrays, and Applications
William G. D. Frederick; Junhong Su; Marc Wigdor, Editor(s)

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