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Proceedings Paper

Determination of vibration axes of the micromachined ring resonator for the modal tuning purposes
Author(s): O. V. Morozov; I. V. Uvarov
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Paper Abstract

In a ring-type resonator as a solid-wave gyroscope, geometric distortions due to microfabrication tolerances perturb the dynamics of the vibration modes used for angular rate sensing, thereby limiting the sensing accuracy. The imperfection of the ring shape causes an unwanted frequency split between the modes. The post-fabrication modal frequency tuning requires the information about the node/antinodes orientation of the standing waves. In this work, we investigate the vibration behavior of micromachined ring-type resonator using a laser vibrometer. Frequency response is measured around the eigenfrequencies of the second order in-plane modes. The node/antinodes location is detected from the frequency response received at the different points of the ring.

Paper Details

Date Published: 15 March 2019
PDF: 6 pages
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220W (15 March 2019); doi: 10.1117/12.2521123
Show Author Affiliations
O. V. Morozov, Institute of Physics and Technology of the RAS (Russian Federation)
I. V. Uvarov, Institute of Physics and Technology of the RAS (Russian Federation)

Published in SPIE Proceedings Vol. 11022:
International Conference on Micro- and Nano-Electronics 2018
Vladimir F. Lukichev; Konstantin V. Rudenko, Editor(s)

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