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Proceedings Paper

GaSb grass as a novel antireflective surface for infrared detectors
Author(s): Brian J. Pepper; Karl Y. Yee; Alexander Soibel; Anita M. Fisher; Sam A. Keo; Arezou Khoshakhlagh; Sarath D. Gunapala
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Paper Abstract

GaSb has a high numerical index (approximately 3.90 at a wavelength of 2 μm), leading to reflection of about 35% of incoming photons, depending on wavelength. This results in a significant loss of quantum efficiency for GaSb-based infrared detectors when backside-illuminated, since GaSb is the first material encountered. Here we demonstrate a way of etching broadband antireflective GaSb grass using an inductively coupled Cl2 plasma etch with O2 micromasking, and we examine the possibility for using this material as an antireflective surface for infrared detectors (a patent is pending concerning integration with GaSb-based infrared detectors). We demonstrate sub-10% reflectivity for wavelengths ranging from 200 nm to 12.2 μm and at angles of incidence up to 58°.

Paper Details

Date Published: 14 May 2019
PDF: 6 pages
Proc. SPIE 11002, Infrared Technology and Applications XLV, 110020X (14 May 2019); doi: 10.1117/12.2521095
Show Author Affiliations
Brian J. Pepper, Jet Propulsion Lab. (United States)
Karl Y. Yee, Jet Propulsion Lab. (United States)
Alexander Soibel, Jet Propulsion Lab. (United States)
Anita M. Fisher, Jet Propulsion Lab. (United States)
Sam A. Keo, Jet Propulsion Lab. (United States)
Arezou Khoshakhlagh, Jet Propulsion Lab. (United States)
Sarath D. Gunapala, Jet Propulsion Lab. (United States)

Published in SPIE Proceedings Vol. 11002:
Infrared Technology and Applications XLV
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson, Editor(s)

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