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Proceedings Paper

Actinic damage of Y/Mo multilayer Bragg optics in a tabletop extreme ultraviolet laser
Author(s): Davide Bleiner
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Paper Abstract

Actinic irradiation (i.e. using ionizing light) of EUV pulses on a multilayer Bragg optics was investigated for characterizing the chemical effects. Photothermal effects are ruled out by the low repetition rate and low absolute energy of the EUV pulses. This would exclude the formation of melt-related particles, which have been however observed. Alternative explanations are discussed. The analysis concentrate on the structure and composition of the multilayer stack, with the aim of quantifying the kinetics.

Paper Details

Date Published: 24 April 2019
PDF: 7 pages
Proc. SPIE 11035, Optics Damage and Materials Processing by EUV/X-ray Radiation VII, 110350J (24 April 2019); doi: 10.1117/12.2520899
Show Author Affiliations
Davide Bleiner, EMPA (Switzerland)

Published in SPIE Proceedings Vol. 11035:
Optics Damage and Materials Processing by EUV/X-ray Radiation VII
Libor Juha; Saša Bajt; Stéphane Guizard, Editor(s)

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