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Proceedings Paper

A high integration 3D temperature controllable micro-reactor fabricated by femtosecond laser wet etching
Author(s): Shuhao Zheng; Qing Yang; Chao Shan; Jinwei Duan; Feng Chen; Xun Hou
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Paper Abstract

Microfluidic chips and microreactors have been widely used in various fields due to their low reagent consumption, fast reaction speed and good safety. Besides, temperature is the key parameter of many biochemical reactions. So it is important for the creation of temperature controllable micro-reactor. However, There are some problems in existing micro-reactors, such as structure, size, temperature control method and temperature distribution. Here we report a method based on an improved femtosecond laser wet etching technology and metal-microsolidifying process for the fabrication of microchannel and 3D microcoils inside fused silica. Based on this approach, we fabricate a temperature controllable micro-reactor used for polymerase chain reaction (PCR) by integrating 3D metallic microcoils and microfluidic channel twined by microcoils inside fused silica. We precisely and conveniently get required temperature by varying the voltage of microcoils. The micro-reactor also exhibits a high integration level and good uniformity of temperature distribution. In addition, we get a miniaturized device which can be conveniently integrated.

Paper Details

Date Published: 24 January 2019
PDF: 8 pages
Proc. SPIE 11052, Third International Conference on Photonics and Optical Engineering, 110520D (24 January 2019); doi: 10.1117/12.2520702
Show Author Affiliations
Shuhao Zheng, Xi'an Jiaotong Univ. (China)
Qing Yang, Xi'an Jiaotong Univ. (China)
Chao Shan, Xi'an Jiaotong Univ. (China)
Jinwei Duan, Xi'an Jiaotong Univ. (China)
Feng Chen, Xi'an Jiaotong Univ. (China)
Xun Hou, Xi'an Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 11052:
Third International Conference on Photonics and Optical Engineering
Ailing Tian, Editor(s)

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