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Proceedings Paper

An on-machine non-contact form measurement method for the high steepness elements
Author(s): Xingtong Fei; Qingliang Zhao; Bing Guo; Zhihao Gao
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Paper Abstract

Due to the problem of spatial interference by the high steepness, the contact measuring device can’t measure the high steepness elements surface profile error. Based on the four-axis ultra-precision machine tools and laser micro-displacement sensor, this paper introuduces a method of the measurement experiment platform. It adjusts the geometrical relationship among the machine axes by laser micro- displacement sensor. The accuracy of the measuring device system error is obtained by the high precision standard ball’s measurement. It establishes the position and the error simulation in spherical coordinate system. Applying this measuring system, it can realize the accurate measurement of the dome part’s surface profile error which includes the measuring multiple bus lines and data fitting.

Paper Details

Date Published: 18 January 2019
PDF: 7 pages
Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108391Y (18 January 2019); doi: 10.1117/12.2520581
Show Author Affiliations
Xingtong Fei, Harbin Institute of Technology (China)
Qingliang Zhao, Harbin Institute of Technology (China)
Bing Guo, Harbin Institute of Technology (China)
Zhihao Gao, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 10839:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment
Fan Wu; Yudong Zhang; Xiaoliang Ma; Xiong Li; Bin Fan, Editor(s)

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