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Proceedings Paper

In-situ measurement of aspherics with sub-aperture deflectometry for precision optical manufacturing
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Paper Abstract

The measurement of aspheric optics has attracted intensive attention in precision engineering, and efficient in-situ measurement technologies are required urgently. Phase measuring deflectometry is a powerful measuring method for complex specular surfaces. In this paper, an in-situ measurement method is developed based on the sub-aperture deflectometry. A complete measuring procedure is developed, including initial calibration, self-adaptive calibration, route planning, imaging acquisition, phase retrieval, gradient calculation, surface reconstruction and sub-aperture stitching. Several key points concerning the sub-aperture measurement are investigated, and effective solutions are proposed to balance the measuring accuracy and aperture, to overcome the height/slope ambiguity and to eliminate the stitching errors caused by point sampling and measuring errors. The measuring flexibility and stability can be greatly improved compared to the existing SCOTS measuring approach.

Paper Details

Date Published: 13 May 2019
PDF: 6 pages
Proc. SPIE 10991, Dimensional Optical Metrology and Inspection for Practical Applications VIII, 1099105 (13 May 2019); doi: 10.1117/12.2519828
Show Author Affiliations
Xiangchao Zhang, Fudan Univ. (China)
Xueyang Xu, Fudan Univ. (China)
Zhenqi Niu, Fudan Univ. (China)
Shaoliang Li, Shanghai Institute of Spaceflight Control Technology (China)
Wanliang Zhao, Shanghai Institute of Spaceflight Control Technology (China)

Published in SPIE Proceedings Vol. 10991:
Dimensional Optical Metrology and Inspection for Practical Applications VIII
Kevin G. Harding; Song Zhang, Editor(s)

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