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Proceedings Paper

Monolithically integrated silicon photonic chip sensor for near-infrared trace-gas spectroscopy
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Paper Abstract

We present a fully integrated photonic chip spectrometer for near-infrared tunable diode laser absorption spectroscopy of methane (CH4). The integrated photonic sensor incorporates a heterogeneously integrated III-V laser/detector chip coupled to a silicon external cavity for broadband tuning, and a long waveguide element (>20 cm) for ambient methane sensing. An on-chip sealed CH4 reference cell is utilized for in-situ wavelength calibration of the external cavity, and a real-time wavelength compensation method for laser calibration is described and demonstrated. The resulting signal is guided back to the III-V photodiodes for spectral signal readout using a custom-designed acquisition board, remotely controlled and operated by a Raspberry Pi unit. Component-level testing of the waveguide sensitivity, external cavity laser, and reference cell is demonstrated. Full-stack testing of the integrated sensor chip yields sub-100 ppmv∙Hz-1/2 sensitivity, and spectral density analysis demonstrates our integrated chip sensor to have a fundamental performance within an order of magnitude of commercially available fiber-pigtailed DFB laser units. We envision our integrated photonic chip sensors to provide disruptive capability in SWaP-C (size, weight, power, and cost) limited applications, and we describe an achievable short-term pathway towards sensitivity enhancement to near-10 ppmv levels.

Paper Details

Date Published: 17 May 2019
PDF: 11 pages
Proc. SPIE 11010, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XX, 110100B (17 May 2019); doi: 10.1117/12.2519206
Show Author Affiliations
Eric J. Zhang, IBM Thomas J. Watson Research Ctr. (United States)
Yves Martin, IBM Thomas J. Watson Research Ctr. (United States)
Jason S. Orcutt, IBM Thomas J. Watson Research Ctr. (United States)
Chi Xiong, IBM Thomas J. Watson Research Ctr. (United States)
Martin Glodde, IBM Thomas J. Watson Research Ctr. (United States)
Nathan Marchack, IBM Thomas J. Watson Research Ctr. (United States)
Elizabeth A. Duch, IBM Thomas J. Watson Research Ctr. (United States)
Tymon Barwicz, IBM Thomas J. Watson Research Ctr. (United States)
Laurent Schares, IBM Thomas J. Watson Research Ctr. (United States)
William M. J. Green, IBM Thomas J. Watson Research Ctr. (United States)


Published in SPIE Proceedings Vol. 11010:
Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing XX
Jason A. Guicheteau; Chris R. Howle, Editor(s)

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