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Proceedings Paper

Mesa pixel isolation with low dark current for improved MTF performance in SWIR photodiode array applications
Author(s): Wei Zhang; Michael J. Evans; Wei Huang; Manuel Morales; Devon Wang; William J. Gustus; Doug Malchow; Paul Bereznycky; Michael Caro; Wei Xu; Scott P. Endicter; John Liobe; Sean Houlihan
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Paper Abstract

Sensors Unlimited Inc. (SUI), a Collins Aerospace company, has developed a short wave infrared (SWIR) photodetector device structure using isolated mesa pixels to improve the detector modulation transfer function (MTF), an important parameter in determining the overall image quality of a camera system. A combination of device fabrication and simulation has been used to evaluate the design and manufacturability of various mesa morphologies. Because mesa formation entails both the removal of some portion of the active region of the photodetector and the introduction of non- planar surfaces, any MTF improvement must be balanced against a loss of quantum efficiency (QE) and potentially higher dark current. Focal plane arrays (FPAs) based on the optimal mesa morphology have been fabricated and compared for MTF and QE performance at the camera level to FPAs built using SUI’s standard pixel structure. The mesa structure described herein is implemented on the front side of the photodetector and could also be implemented across all of SUI’s backside-illuminated (i.e., VIS/SWIR, NIR/SWIR, SWIR) structures for applications where a premium is placed on MTF performance.

Paper Details

Date Published: 7 May 2019
PDF: 13 pages
Proc. SPIE 11002, Infrared Technology and Applications XLV, 1100213 (7 May 2019); doi: 10.1117/12.2519142
Show Author Affiliations
Wei Zhang, Sensors Unlimited, a Collins Aerospace Co. (United States)
Michael J. Evans, Sensors Unlimited, a Collins Aerospace Co. (United States)
Wei Huang, Sensors Unlimited, a Collins Aerospace Co. (United States)
Manuel Morales, Sensors Unlimited, a Collins Aerospace Co. (United States)
Devon Wang, Sensors Unlimited, a Collins Aerospace Co. (United States)
William J. Gustus, Sensors Unlimited, a Collins Aerospace Co. (United States)
Doug Malchow, Sensors Unlimited, a Collins Aerospace Co. (United States)
Paul Bereznycky, Sensors Unlimited, a Collins Aerospace Co. (United States)
Michael Caro, Sensors Unlimited, a Collins Aerospace Co. (United States)
Wei Xu, Sensors Unlimited, a Collins Aerospace Co. (United States)
Scott P. Endicter, Sensors Unlimited, a Collins Aerospace Co. (United States)
John Liobe, Sensors Unlimited, a Collins Aerospace Co. (United States)
Sean Houlihan, Sensors Unlimited, a Collins Aerospace Co. (United States)


Published in SPIE Proceedings Vol. 11002:
Infrared Technology and Applications XLV
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson, Editor(s)

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