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Proceedings Paper

Self-aligned processing techniques for semiconductor stripe lasers
Author(s): Hongliang Zhu; Hartmut Hillmer
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Paper Abstract

In this article we will generalize and analyze different self-aligned techniques for different stripe lasers, for example: ridge waveguide lasers, buried heterostructure stripe lasers, mushroom-stripe lasers, etc. Finally, a novel self-aligned processing technique for fabricating buried mushroom-stripe lasers is proposed and it has been utilized successfully in fabricating bent waveguide mushroom-stripe MQW DFB lasers.

Paper Details

Date Published: 24 September 1996
PDF: 9 pages
Proc. SPIE 2886, Semiconductor Lasers II, (24 September 1996); doi: 10.1117/12.251900
Show Author Affiliations
Hongliang Zhu, Institute of Semiconductors (China)
Hartmut Hillmer, Deutsche Telekom (Germany)

Published in SPIE Proceedings Vol. 2886:
Semiconductor Lasers II
Siamak Forouhar; Qiming Wang, Editor(s)

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