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Proceedings Paper

Capacitive micro-force sensor as a transfer standard for verification and calibration of nanoindentation instruments
Author(s): Dan Xiang
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Paper Abstract

A traceable micro-force sensor capable of measuring forces in the range of micronewtons to millinewtons was developed. This sensor consists of a pair of parallel electrodes to provide precise capacitance measurements. In conjunction with a traceable ultrahigh accuracy capacitance bridge, this sensor can be used as a secondary transfer micro-force standard after being calibrated against the primary forces realized with deadweights. This micro-force senor was used to verify commercial nanoindentation instruments. By comparing the measurement readings from the calibrated micro-force sensor and those recordings from a nanoindentation system, the errors of loading from that instrument can been determined. The calibration results show that significant errors present in the commercial nanoindentation instruments when their loading forces are extended to the micronewton range, which is not, and unable to be calibrated directly with available standards and current practices.

Paper Details

Date Published: 13 May 2019
PDF: 8 pages
Proc. SPIE 10982, Micro- and Nanotechnology Sensors, Systems, and Applications XI, 1098239 (13 May 2019); doi: 10.1117/12.2518952
Show Author Affiliations
Dan Xiang, X-Wave Innovations, Inc. (United States)

Published in SPIE Proceedings Vol. 10982:
Micro- and Nanotechnology Sensors, Systems, and Applications XI
Thomas George; M. Saif Islam, Editor(s)

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