Self-assembled rolled-up microtubes are exploited to rigorously compact 2D devices into 3D microarchitectures. We demonstrate integration of transistors, integrated circuitry as well as electronic, photonic and magnetic components into microtube devices for sensor arrays and novel device platforms such as lab-in-a-tube systems. In combination with self-wound energy storage units our work bridges lengthscales for a new generation of high performance electronic microdevices.

Date Published: 16 August 2019
PDF
Proc. SPIE 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019, 1095808 (16 August 2019); doi: 10.1117/12.2518395

Published in SPIE Proceedings Vol. 10958:
Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
Martha I. Sanchez; Eric M. Panning, Editor(s)