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Proceedings Paper

3D polymer-based air-bridge waveguides for on chip applications
Author(s): Matej Goraus; Dusan Pudis; Ivan Martincek; Petra Urbancova
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Paper Abstract

In this paper we proposed new concept for fabrication of 3D polymer waveguides with surface Bragg grating (SBG). For the structures fabrication we used 3D laser lithography based on direct laser writing process with nonlinear two-photon absorption in photosensitive material. High-resolution negative IP-Dip photoresist for the structure fabrication was used. The 3D photonic structure consists of supporting structure and waveguide with SBG. To improve the light guiding properties, waveguide part was isolated from the supporting structure by thin polymer pillars. The SBG parameters were numerically proposed by transfer matrix method to reflect narrow spectral band at 1.55 μm wavelength. Design of the proposed structure is suitable as a sensor for on-chip application for measurement of temperature or refractive index. Reflection characteristics of the SBG waveguide were measured with direct edge optical fiber coupling by optical spectrum analyzer. Quality of prepared structure was investigated by scanning electron microscope.

Paper Details

Date Published: 18 December 2018
PDF: 4 pages
Proc. SPIE 10976, 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 109760T (18 December 2018); doi: 10.1117/12.2518200
Show Author Affiliations
Matej Goraus, Univ. of Žilina (Slovakia)
Dusan Pudis, Univ. of Žilina (Slovakia)
Ivan Martincek, Univ. of Žilina (Slovakia)
Petra Urbancova, Univ. of Žilina (Slovakia)

Published in SPIE Proceedings Vol. 10976:
21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Pavel Zemánek, Editor(s)

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