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SALELE process from theory to fabrication
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Paper Abstract

In this work we are introducing a manufacturing flow for the SALELE Process in details. Starting with layout decomposition, where the drawn layer is decomposed into 4 Masks: 2 Metal-like Masks, and 2 Block-like Masks. Then each of these masks is subjected to Optical Proximity Correction (OPC) process, and here we explain more about the OPC recipe development for each mask. Then we introduce a verification flow that performs two levels of verifications: (a) Litho verification, where the litho fidelity of each mask is quantified based on image quality measurements. (b) Final Manufactured shapes verification vs. expected output. This work has been carried out on an N3 candidate layout designed by IMEC.

Paper Details

Date Published: 21 March 2019
PDF: 12 pages
Proc. SPIE 10962, Design-Process-Technology Co-optimization for Manufacturability XIII, 109620V (21 March 2019); doi: 10.1117/12.2517051
Show Author Affiliations
Youssef Drissi, IMEC (Belgium)
Werner Gillijns, IMEC (Belgium)
Jae Uk Lee, IMEC (Belgium)
Ryan Ryoung han Kim , IMEC (Belgium)
Ahmed Hamed-Fatehy, Mentor Graphics Egypt (Egypt)
Rehab Kotb, Mentor Graphics Egypt (Egypt)
Rajiv Naresh Sejpal, Mentor Graphics Corp. (Belgium)
Germain Fenger, Mentor Graphics Corp. (United States)
James Word, Mentor Graphics Corp. (United States)

Published in SPIE Proceedings Vol. 10962:
Design-Process-Technology Co-optimization for Manufacturability XIII
Jason P. Cain, Editor(s)

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