By imparting local, space-variant phase changes on an incident electromagnetic wave, metasurfaces are capable of manipulating lights. These surfaces have been constructed from nanometallic optical antennas as well as high-index dielectric antennas. We introduce a unique scalable Fourier transform 4-f system that is applied to lithography. We demonstrate the experimental realization of a flexible Fresnel element, where pixelated one dimensional gratings with space-variant frequencies and orientations are assembled in low-index material as the UV resin on polyethyleneterephthalate (PET) substrate, achieving good concentration performance in the visible spectrum.

Date Published: 25 October 2018
PDF: 6 pages
Proc. SPIE 10823, Nanophotonics and Micro/Nano Optics IV, 108231J (25 October 2018); doi: 10.1117/12.2515584

Published in SPIE Proceedings Vol. 10823:
Nanophotonics and Micro/Nano Optics IV
Zhiping Zhou; Kazumi Wada, Editor(s)