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Proceedings Paper

Laser material processing in the ablation-cooled regime: Ablation efficiency and quality using single fs-, bursts of fs-, and single ns-pulses (Conference Presentation)
Author(s): Matthias Domke; Sandra Stroj; Victor Matylitsky

Paper Abstract

In recent years, the burst-mode caused a lot of attention and confusion in the field of micro machining with ultrashort-pulsed lasers. There is an ongoing debate about the laser-matter interaction and the impact on ablation efficiency and quality of applying burst trains with two to hundreds of pulses at MHz to GHz frequencies. Our results reveal that the ablation behaviour achieved with bursts of 28 pulses at 154 MHz is rather similar to the ablation with a ns-laser with a pulse duration equal to the temporal burst train length of 175 ns than to a fs-laser operated in single-pulse mode.

Paper Details

Date Published: 13 March 2019
Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 1090502 (13 March 2019); doi: 10.1117/12.2514441
Show Author Affiliations
Matthias Domke, FH Vorarlberg (Austria)
Sandra Stroj, FH Vorarlberg (Austria)
Victor Matylitsky, Spectra-Physics Rankweil (Austria)

Published in SPIE Proceedings Vol. 10905:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
Tetsuya Makimura; Gediminas Račiukaitis; Carlos Molpeceres, Editor(s)

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