With rapid developments of micro/nano science and technology, precision platforms are widely required in the research and industry fields. This paper presents a 2-DOF parallel linear precision platform utilizing piezoelectric impact drive mechanism. With symmetrical flexible structure and specific piezoelectric driving manner, effective and decoupled actuation of the stator is achieved. FEA simulations are conducted to investigate the characteristics of the stator. With established dynamic model of the platform, motion responses of stator and slider in the two directions are simulated and analyzed. With simultaneous actuation of the 2-DOF motions, a motion interaction phenomenon is raised and discussed.

Date Published: 7 March 2019
PDF: 8 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110534B (7 March 2019); doi: 10.1117/12.2512795

Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)