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Proceedings Paper

Integration of DFB lasers with surface-micromachined wavelength-monitoring devices for WDM systems
Author(s): Shi-sheng Lee; Lih-Yuan Lin; Ming C. Wu
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Paper Abstract

A novel precision wavelength monitor comprising 3D microlenses and rotatable gratings has been demonstrated on a single chip of Si using free-space micro-optical bench (FSMOB) technique. Batch-fabricated by surface- micromachining, the integrable wavelength monitor is potentially low cost, light weight, and small volume, and can be directly incorporated into the packages of active semiconductor optoelectronic sources and detectors. All the micro-optical elements on the FSMOB have been `pre-aligned' during the layout of the photomasks. A 1.3 micrometers distributed feedback (DFB) laser has been integrated with this micro- wavelength-meter on the Si substrate using a self-aligned hybrid-integration scheme. A laser-power-independent linear response has been obtained over the entire thermal tuning range of the DFB laser (1.2 nm). The wavelength reading can potentially by fed back to control and stabilize the wavelength of the DFB laser for wavelength-division multiplexed optical communication systems. It is also very useful for spectroscopy applications.

Paper Details

Date Published: 23 September 1996
PDF: 8 pages
Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); doi: 10.1117/12.251261
Show Author Affiliations
Shi-sheng Lee, Univ. of California/Los Angeles (United States)
Lih-Yuan Lin, Univ. of California/Los Angeles (United States)
Ming C. Wu, Univ. of California/Los Angeles (United States)

Published in SPIE Proceedings Vol. 2881:
Microelectronic Structures and MEMS for Optical Processing II
M. Edward Motamedi; Wayne Bailey, Editor(s)

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