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Proceedings Paper

Micromirror arrays for coherent beam steering and phase control
Author(s): Steven C. Gustafson; Gordon R. Little; Victor M. Bright; John H. Comtois; Edward A. Watson
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Paper Abstract

Micromirror arrays have been designed, fabricated, and tested that can steer coherent beams and that can simultaneously implement continuous phase control for beam shaping or aberration correction. A typical micromirror consists of a polysilicon plate (metalized for reflection) that is less than 100 microns in maximum dimension. Each micromirror is suspended a few microns above a polysilicon electrode by flexure hinges, and potentials of less than 50 volts applied to the electrodes displace the micromirrors over continuous ranges. Applications for arrays of these micromirrors include adaptive optics, active optical interconnections, and laser radar and communications.

Paper Details

Date Published: 23 September 1996
PDF: 10 pages
Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); doi: 10.1117/12.251257
Show Author Affiliations
Steven C. Gustafson, Univ. of Dayton (United States)
Gordon R. Little, Univ. of Dayton (United States)
Victor M. Bright, Air Force Institute of Technology (United States)
John H. Comtois, Air Force Institute of Technology (United States)
Edward A. Watson, Air Force Wright Lab. (United States)

Published in SPIE Proceedings Vol. 2881:
Microelectronic Structures and MEMS for Optical Processing II
M. Edward Motamedi; Wayne Bailey, Editor(s)

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