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Proceedings Paper

Application of micromachining technology to optical devices and systems
Author(s): Hiroyuki Fujita
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Paper Abstract

Micromachine technologies based on IC-compatible micromachining have advantages denoted by three `M's'. Miniaturization is the most popular but Multiplicity, which means the batch fabrication capability of many complicated elements, and Microelectronics to control motions or to add different functions such as the optical function are equally important. This paper deals with the application of micromachine technologies to micro optical devices. A basic concept making the best use of the advantages is proposed. Recent examples of optical microelectromechanical systems are reviewed.

Paper Details

Date Published: 23 September 1996
PDF: 10 pages
Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); doi: 10.1117/12.251233
Show Author Affiliations
Hiroyuki Fujita, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 2879:
Micromachining and Microfabrication Process Technology II
Stella W. Pang; Shih-Chia Chang, Editor(s)

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