Actuators made of Giant Magnetostrictive Material (GMM) are used more and more widely in ultra-precision positioning, processing, measurement, and vibration isolation of equipment. While a single Giant Magnetostrictive Actuator (GMA) has low load capacity and non-ideal dynamic output characteristics, this paper presents a differential Giant Magnetostrictive Mitro-Displacement Actuator. The effect of the equivalent stiffness and quality of the load on the output characteristics of the actuator is analyzed by establishing the dynamic model of differential GMA. The experimental results show that compared to a single GMA micro-displacement actuator system, the differential GMA system has a positioning noise of ±3 nm, a resolution of 6 nm within a 18.5μm travel range. In the composite control system, a hysteresis-free sinusoidal displacement output with an amplitude of 3μm within 200 Hz is realized, and the maximum output error is 0.6μm, which effectively improves the dynamic performance of the actuator and improves the load capacity of the actuator.

Date Published: 7 March 2019
PDF: 9 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110533Z (7 March 2019); doi: 10.1117/12.2512315

Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)