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Proceedings Paper

Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures
Author(s): Christopher W. Dyck; James H. Smith; Samuel L. Miller; E. M. Russick; C. L. J. Adkins
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Paper Abstract

Results are presented supporting the use of supercritical carbon dioxide (SCCO2) drying to enhance the yield of surface-micromachined micromechanical devices following the final release etch. The equipment and extraction process of the SCCO2 system are described, and results of successfully released cantilevered beams and microengines are presented. A new system capable of drying 6 inch wafers is also described.

Paper Details

Date Published: 23 September 1996
PDF: 11 pages
Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996);
Show Author Affiliations
Christopher W. Dyck, Sandia National Labs. (United States)
James H. Smith, Sandia National Labs. (United States)
Samuel L. Miller, Sandia National Labs. (United States)
E. M. Russick, Sandia National Labs. (United States)
C. L. J. Adkins, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 2879:
Micromachining and Microfabrication Process Technology II
Stella W. Pang; Shih-Chia Chang, Editor(s)

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