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Proceedings Paper

More efficient optical sectioning structured illumination microscopy
Author(s): Changchun Chai; He Zhou; Peng Zhou; Chi Zhang; Hongzhou Yan; Xiaojun Liu
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Paper Abstract

In this paper, a structural illumination based technology for microscopic surface topography measurement is investigated, in which only one shot structural illumination image is grabbed and a more efficient optical sectioned image reconstruction algorithm based on Hilbert transform was proposed. Compared with other methods, the technology can avoid strip artefacts problems of in-focus images resulting from the sinusoidal phases mismatch in spatial domain in conventional three-step phase-shifting since the phase-shifting steps decreases from three to one, and the measurement time is decreased effectively. The experimental testing is carried out to verify the feasibility and its measurement accuracy.

Paper Details

Date Published: 7 March 2019
PDF: 6 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 1105338 (7 March 2019); doi: 10.1117/12.2512099
Show Author Affiliations
Changchun Chai, Huazhong Univ. of Science and Technology (China)
He Zhou, Huazhong Univ. of Science and Technology (China)
Peng Zhou, Huazhong Univ. of Science and Technology (China)
Chi Zhang, Huazhong Univ. of Science and Technology (China)
Hongzhou Yan, Huazhong Univ. of Science and Technology (China)
Xiaojun Liu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)

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