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Proceedings Paper

Fabrication of LIGA mold inserts using a modified procedure
Author(s): Vikas Galhotra; Christophe Marques; Yohannes M. Desta; Kevin W. Kelly; Mircea S. Despa; Ajit Pendse; John R. Collier
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Paper Abstract

The LIGA process, invented in Germany and being further developed at Louisiana State University can be used to economically mass produce high aspect ratio microstructures (HARM) by molding. The template, or mold insert, is required to mold microstructure and is fabricated by a two step sequence of x-ray lithography and electroplating. A modified version of the LIGA process has been used to produce a mold insert. A sheet of PMMA is first patterned using x-ray lithography. After the lithography process is completed, the PMMA sheet is clamped to a nickel substrate and a subsequent electroplating step produces a mold insert. This processing sequence eliminates the need to establish a chemical bond between the resist and the substrate. The electroplated HARM were used as a mold insert in subsequent molding experiments. One mold insert which was fabricated is presented, along with the results of molding experiments using a similar insert.

Paper Details

Date Published: 23 September 1996
PDF: 6 pages
Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); doi: 10.1117/12.251204
Show Author Affiliations
Vikas Galhotra, Louisiana State Univ. (United States)
Christophe Marques, Louisiana State Univ. (United States)
Yohannes M. Desta, Louisiana State Univ. (United States)
Kevin W. Kelly, Louisiana State Univ. (United States)
Mircea S. Despa, Louisiana State Univ. (United States)
Ajit Pendse, Louisiana State Univ. (United States)
John R. Collier, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 2879:
Micromachining and Microfabrication Process Technology II
Stella W. Pang; Shih-Chia Chang, Editor(s)

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