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Proceedings Paper

Fiber grating coupler development for Si-photonics process design kits at CEA-LETI
Author(s): Daivid Fowler; Philippe Grosse; Fabien Gays; Bertrand Szelag; Charles Baudot; Nathalie Vuillet; Jonathon Planchot; Frederic Boeuf
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Paper Abstract

Various aspects of grating coupler development are presented to illustrate how the performance and yield of this key component of our silicon photonics platform has improved over recent years. The device design concept, fabrication and testing are discussed in order to give a more general insight into the challenges faced in increasing the maturity level of silicon photonics platforms. In particular, we will highlight some key areas in which tools and solutions developed for the CMOS electronics industry have proven inapplicable in the case of photonics, requiring that established methods be heavily modified or replaced.

Paper Details

Date Published: 4 March 2019
PDF: 7 pages
Proc. SPIE 10922, Smart Photonic and Optoelectronic Integrated Circuits XXI, 1092205 (4 March 2019); doi: 10.1117/12.2511845
Show Author Affiliations
Daivid Fowler, CEA-LETI (France)
Philippe Grosse, CEA-LETI (France)
Fabien Gays, CEA-LETI (France)
Bertrand Szelag, CEA-LETI (France)
Charles Baudot, STMicroelectronics S.A. (France)
Nathalie Vuillet, STMicroelectronics S.A. (France)
Jonathon Planchot, STMicroelectronics S.A. (France)
Frederic Boeuf, STMicroelectronics S.A. (France)

Published in SPIE Proceedings Vol. 10922:
Smart Photonic and Optoelectronic Integrated Circuits XXI
Sailing He; El-Hang Lee, Editor(s)

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